| Titre : | Introductory MEMS : fabrication and applications | | Type de document : | texte imprimé | | Auteurs : | Thomas M. Adams, Auteur ; Richard A. Layton, Auteur | | Editeur : | New York, Dordrecht, Heidelberg : Springer | | Année de publication : | 2009 | | Importance : | 444 p. | | Présentation : | couv. ill. en coul., ill. | | Format : | 24 cm. | | ISBN/ISSN/EAN : | 978-0-387-09510-3 | | Langues : | Anglais (eng) | | Catégories : | ELECTRONIQUE
| | Index. décimale : | 09-09 capteurs | | Résumé : | Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter.
Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines. | | Note de contenu : | Contents
Preface xiii
Part I Fabrication
Chapter 1 Introduction
Chapter 2 The substrate and adding material to it
Chapter 3 Creating and transferring patterns-Photolithography
Chapter 4 Creating structures-Micromachining
Chapter 5 Solid mechanics
Part II Applications
Chapter 6 Thinking about modeling
Chapter 7 MEMS transducers-An overview of how they work
Chapter 8 Piezoresistive transducers
Chapter 9 Capacitive transducers
Chapter 10 Piezoelectric transducers
Chapter 11 Thermal transducers
Chapter 12 Introduction to microfluidics
Part III Microfabrication laboratories
Chapter 13 Microfabrication laboratories
-Appendix A B C D
-Glossary |
Introductory MEMS : fabrication and applications [texte imprimé] / Thomas M. Adams, Auteur ; Richard A. Layton, Auteur . - New York, Dordrecht, Heidelberg : Springer, 2009 . - 444 p. : couv. ill. en coul., ill. ; 24 cm. ISBN : 978-0-387-09510-3 Langues : Anglais ( eng) | Catégories : | ELECTRONIQUE
| | Index. décimale : | 09-09 capteurs | | Résumé : | Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter.
Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines. | | Note de contenu : | Contents
Preface xiii
Part I Fabrication
Chapter 1 Introduction
Chapter 2 The substrate and adding material to it
Chapter 3 Creating and transferring patterns-Photolithography
Chapter 4 Creating structures-Micromachining
Chapter 5 Solid mechanics
Part II Applications
Chapter 6 Thinking about modeling
Chapter 7 MEMS transducers-An overview of how they work
Chapter 8 Piezoresistive transducers
Chapter 9 Capacitive transducers
Chapter 10 Piezoelectric transducers
Chapter 11 Thermal transducers
Chapter 12 Introduction to microfluidics
Part III Microfabrication laboratories
Chapter 13 Microfabrication laboratories
-Appendix A B C D
-Glossary |
|  |
Affiner la recherche Interroger des sources externesIntroductory MEMS / Thomas M. Adams
